Matériel de laboratoire et de précision
Tender for FTIR monitoring solution for DRE in semiconductor gaseous abatement systems
Royaume-UniSwansea University
The Faculty of Science and Engineering at Swansea University is seeking to procure a complete, turnkey FTIR-based system for determining Destruction or Removal Efficiency (DRE) of semiconductor point-of-use abatement systems. This equipment will be housed in the Centre for Integrative Semiconductor Materials (CISM) at Swansea Universities Bay Campus. The existing abatement system installed in CISM, is currently unmonitored in terms of DRE, and a there is an urgent requirement to have continuous DRE monitoring to inform both process and abatement experiments and drive efficiency improvements. A